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Process Control Software with a Proven Return

Rudolph Technologies offers a suite of enterprise-level advanced process control software products designed to reduce costs and improve process performance. As processes become more challenging, manufacturers are becoming more dependent on data management systems to deliver fast and accurate process information analysis. A wide range of process solutions is available to you today, allowing you to:

 

  • Monitor the health of a complete production line
  • Quickly identify tool problems
  • Perform real-time root cause analysis
  • Facilitate recipe management
  • Deploy fault detection and run-to-run control

 

In any factory. On any process. On any tool.

ARTIST Software

Fault Detection and Classification

Collect and analyze data to prohibit scrap-generating events
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AutoShell Software

Equipment Automation Software

Coordinate data flow between operators, equipment and factory systems
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ControlWORKS Software

Advanced Equipment Control

Providing an open, object-oriented development environment
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Discover Enterprise Software

In-line Yield and Defect Management

Seamless integration of yield and defect management software
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Discover Solar Software

Improve Energy Conversion Efficiency

Fab management software tool designed specifically for PV manufacturers
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Genesis Software

Offline Yield Analysis Package

For Semiconductor (fab and fabless) and Flat Panel Display Manufacturers
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Process Sentinel Software

High Performance Data Classification Reduces Costs and Scrap

Monitor your process 24/7, and trace surface patterns to inline process issues
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ProcessWORKS Software

Advanced Process Control

Software for run-to-run control
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TrueADC Enterprise Software

High Performance ADC for the Entire Fab

A single ADC system able to easily support multiple tool sets for the lowest cost of ownership model in the industry
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Yield Optimizer Software

Accurately Model Complex Processes to Improve Yield

Identify new changes and provide intuitive tools to verify results
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