GAMMA2™ connects applications to tools, enabling fault detection and run-to-run process control. With or without a SECS communication port, GAMMA2 communicates with semiconductor process tools to allow access to equipment information. The GAMMA2 compact hardware platform uses an X86 processor, Linux OS, hard drive, and a range of I/O ports. With serial, ethernet, analog and digital capabilities, GAMMA2 supports a wide range of equipment connectivity requirements ranging from protocol conversion to complex support for advanced process control.

Rudolph Technologies stands behind GAMMA2 with a limited hardware warranty and convienient return authorization form.

For more information about GAMMA2, please contact us.