Rudolph : TrueADC Enterprise Software

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TrueADC Enterprise Software

TrueADC Enterprise™ software harnesses the power of a dynamic defect library method to overcome the limitations and frustrations of traditional ADC. TrueADC Enterprise ensures database lookup, classification, and response to the tool occur before the tool has captured the next image. TrueADC Enterprise allows recipe sharing and engineering control of operator classifications before entering the database, enabling consistent performance.

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Overview

Achieve the same high performance for standard TrueADC across your entire fab for SEM and optical review
Improve the efficiency of an expensive SEM by enabling TrueADC on your optical review station
Consolidate your multiple ADC packages into a single solution that serves your entire fab
The TrueADC solution results in lower defect review cost of ownership, with minimal impact to throughput of the inspection tool
Extensive engineering resources are not required because TrueADC is scalable - it adapts to changing process requirements
TrueADC integrates into a fab's existing manual review process so operators do not need to be retrained
Spend less time on recipe creation and setup; a default recipe is provided with the TrueADC installation
TrueADC offers intuitive maintenance screens like interactive confusion matrices and defect distribution charts to automatically monitor the health of the engine
With the use of Rudolph's "plug-n-play" wafer maps, multiple wafer maps are supported
The TrueADC solution can easily be optimized for maximum performance while automatically classifying as many defects as possible with a high level of accuracy

Classification

Yield Optimizer Software

Accurately Model Complex Processes to Improve Yield

Process Sentinel Software

High Performance Data Classification Reduces Costs and Scrap