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From Detection to Decision

Rudolph's macro defect inspection systems provide optimum resolution and throughput for maximum detectability and productivity for next-generation process requirements. A key contributor to our unique position as the macro inspection market leader in both front-end wafer processing and final manufacturing is our all-surface inspection systems for wafer frontside, edge and backside defects. And, Rudolph inspection solutions like the August NSX® Series continue to set the standard for outgoing quality control and post-fab applications including bump, saw and probe.

AXi Series

Advanced Macro Defect Inspection

The synergy of resolution and throughput for today's advanced processes
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B20 System

Wafer Backside Inspection

High-throughput full backside inspection of bare and product wafers with on-the-fly color image capture
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E25 System

Wafer Edge Inspection

High-throughput full edge inspection of bare and product wafers with on-the-fly color image capture
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E25/B20 Inspection System

Wafer Edge and Backside Inspection

High-throughput full edge and backside inspection of bare and product wafers with on-the-fly color image capture
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Explorer Inspection Cluster

Advanced Macro Defect Inspection

Fast, accurate and reliable macro defect inspection - Click 'Learn More' for a 360 degree view of the Explorer Inspection Cluster
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NSX Series

The Inspection Standard for Final Manufacturing

Probe mark inspection: quality assurance for Known Good Die and die products
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PrecisionPoint VX3 System

Probe Card Test and Analysis

Efficient probe card test, analysis, and rework for fine pitch, small array probe cards
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Probe Card Interface

Custom Probe Card Interface

Customer and application-specific mechanical and electrical interfaces that are critical for the probe card test and analysis process
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ProbeWoRx 300 System

Probe Card Test and Analysis

High speed, high force, and high throughput for high pin-count, large array probe cards
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WaferView Series

Macro Defect Inspection

Catch critical defects missed by gray-scale systems
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WaferWoRx 300 System

Wafer Probing Process Analysis

Scrub mark analysis for sort process control and yield improvement
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WS 3800 System

Advanced Defect Detection for Post-fab Process Management

Superior defect detection capability
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