The AXi Series for advanced macro defect inspection provides microelectronic device manufactures a single inspection solution for Litho, CMP, Etch, and Deposition process modules. Designed to exceed both typical macro resolution and throughput, the AXi Series provides timely, accurate and complete process information. This information enables process-enhancing decisions to increase yields, ultimately reducing costs and accelerating time-to-market.

For more information about the AXi Series, please contact us.