The AXi™ 940 frontside inspection module is designed to reduce cost of ownership by improving defect detectability across multiple front-end applications while also reducing engineering support cost through automatic recipe features. It delivers higher resolution than traditional macro systems while maintaining high throughput required in today's advanced high-volume processes. By eliminating the small lot penalty and providing numerous automated capabilities, the AXi 940 addresses customer demand for both productivity as well as capability.

Explorer Inspection Cluster

For more information about the AXi 940 please contact us.