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WS3840 System

For both standard and flip chip wafers for 200 mm and 300 mm in diameter, the WS3840 Wafer Inspection System provides superior yield management for defect inspection throughout post-fab processes. Defects created in the post-fab area between wafer processing and final manufacturing can negatively impact production yields and time-to-market. The WS3840 quickly and reliably locates wafer defects and classifies them -- reducing process costs and improving yield. No wonder the WS3840 is the industry standard for advanced packaging applications.

 

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Overview

  • Superior defect detection capability
  • Industry standard 3D inspection capability of flipchip wafers
  • 100% inspection ensures no escapes
  • Integrated inspection tool for fast response to process variations
  • Inspection step is a valuable addition to the entire wafer manufacturing process
  • Proven production reliability