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MetaPULSE IIIa System

The MetaPULSE® IIIa thin film metrology tool offers high throughput and low cost-of-ownership for film thickness measurements in aluminum applications. PULSE Technology™ provides high-volume, on-product thickness and material characterization for opaque (metal) films over a broad range of types, dimensions and multilayered configurations. The MetaPULSE IIIa delivers up to 25 percent greater throughput than previous generations.

 

For more information about the MetaPULSE IIIa System, please contact us.

Overview

  • The trusted technology for on-product measurements
  • Small spot size and high magnification optics increase accuracy
  • Operates on the common Rudolph automation platform
  • Ideal for DRAM and flash memory manufacturing for 80, 65, 45, and 32 nm devices
  • Matching and recipe compatibility with previous MetaPULSE generations