FLANDERS, NEW JERSEY (January 28, 2011) – Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, today announced a change to the time of the Company’s conference call to be held in conjunction with the release of financial results for the 2010 fourth quarter after the market closes on January 31, 2011.

REVISED DETAILS FOR 2010 FOURTH QUARTER CONFERENCE CALL

Date: January 31, 2011
Revised Time: 5:30 p.m. (Eastern Time)
Hosts: Paul F. McLaughlin, Chairman and Chief Executive Officer and Steven Roth, Chief Financial Officer

The conference call will be broadcast live over the Internet. To access the live webcast, please visit the Company's Web site at www.rudolphtech.com. Please go to the Website at least fifteen minutes prior to the call to register, download and install any necessary audio software.

About Rudolph Technologies
Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company’s yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at www.rudolphtech.com.