Rudolph's defect inspection technology positioned to capitalize on offering both standalone as well as integrated solutions

Flanders, NJ (October 25, 2006) -- Today, Rudolph Technologies (NASDAQ: RTEC) and Tokyo Electron Limited (TSE 1st Section), major equipment suppliers to semiconductor fabs, announced an agreement between the two companies that will provide Tokyo Electron (TEL) worldwide distribution rights for Rudolph's integrated lithography inspection technologies, to be included within TEL's coater/developer.

"This agreement provides full distribution responsibilities to TEL, which supports TEL's long standing core values of providing excellent customer satisfaction. Rudolph and TEL recognize customers' preference for streamlined communications and quick resolution to any issues that may arise -- both companies were in complete agreement that a single party providing a total package solution of sales and support would be the most straightforward arrangement to accomplish this goal," said Toshi Nishigaki, TEL's Director of Clean Track Sales and Marketing.

"We are pleased to have established such a special relationship with TEL for our integrated lithography approach," said Ardy Johnson, Rudolph's Vice President of Marketing. "We are particularly excited that this relationship is defined for the long term, and addresses possible next-generation integrated inspection technologies. There has been a consistent demand in the semiconductor equipment industry to date for faster inspection with higher optical resolution capability that captures new breeds of defects." Johnson added, "This integrated lithography offering compliments our own direct standalone approach very nicely, providing a complete lithography solution for our customers."

Tokyo Electron Limited (TEL), established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange. www.tel.com.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Safe Harbor Statement
This announcement contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2005 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SEC's website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, contact:

Rudolph Technologies
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Media:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com

Tokyo Electron
Nishigaki Toshi
toshi.nishigaki@tel.com