Discover software complements NSX, providing complete in-line defect analysis and data management solutions for automotive applications

Flanders, New Jersey (June 30, 2008) -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, today announced the sale of an NSX® Inspection System and Discover™ in-line defect analysis and data management software to Micronas, a leading supplier of integrated circuits (ICs) and sensor system solutions for consumer and automotive electronics. Rudolph's complete inspection solution -- the NSX System with the Discover server and software -- is scheduled for shipment in June 2008.

The NSX 115 joins an existing NSX 105 system in Micronas' Freiburg, Germany-based fab to provide additional inspection capacity demanded by the 100 percent inspection requirements of Micronas' customers in the automotive market. Rudolph's Discover software will link the systems to provide intelligent sampling strategies and fast, efficient identification of actionable events and trends.

Martin Molan, General Manager of Rudolph's European business states, "Discover software has been particularly valuable for the automotive device makers, having demonstrated overall throughput enhancement of over 20 percent for the inspection and review step necessary to achieve zero defects."

"This purchase was driven by rapid growth in demand for our automotive products," commented Nikolaus-Viktor Kaeppeler, Vice President Operations at Micronas. "Our customers' requirements for 100 percent inspection made throughput our top purchase decision criteria. Our selection also reflects the excellent experience we have had with our first NSX system, and we believe the analysis and reporting features of Discover will help us understand and act on defect issues in a timely manner. High quality is a no-compromise area for our customers, as well as for us."

"The NSX 115 System with our Discover software is an industry-leading, complete solution for our customers," added Molan. "The combination of throughput and sensitivity has made the NSX the tool-of-choice for high-volume, zero defect inspection applications like automotive electronics.This market is dominated by European device manufacturers; over 90 percent of those manufacturers rely on Rudolph inspection systems to ensure their quality control."

Rudolph's Discover in-line defect analysis and data management system helps manufacturers use inspection data more effectively to reduce manufacturing costs and accelerate time to market for new products. Discover provides users with many useful features such as wafer display, customizable charts and fast incident alarms.

The NSX Macro Defect Inspection System is a fast, repeatable inspection solution designed for applications in the back end of the semiconductor manufacturing process. Macro defects (defects 0.5 micron and larger) can be created during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the performance and quality of a microelectronic device. The NSX system quickly and accurately detects yield-inhibiting defects, ensuring product quality and providing valuable process information.

About Micronas
Micronas (SWX Swiss Exchange: MASN), a semiconductor designer and manufacturer with worldwide operations, is a leading supplier of cutting-edge IC and sensor systems solutions for consumer and automotive electronics. As a market leader in innovative global TV system solutions, Micronas leverages its expertise into new markets emerging through the digitization of audio and video content. Micronas also offers a variety of microcontrollers and Hall-sensors for automotive and industrial applications such as car dashboards, body control, as well as motor management and comfort functions.

Micronas serves all major consumer and automotive electronics customers worldwide, many of them in continuous partnerships seeking joint success. While the holding company is headquartered in Zurich (Switzerland), operational headquarters are based in Freiburg (Germany). Currently, the Micronas Group employs around 2000 people. In 2007, it generated CHF 713/USD 596/EUR 433 million in sales.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act"). In some cases, you can identify those so-called "forward-looking statements" by words such as "may," "will," "would," "should," "expects," "plans," "anticipates," "believes," "feels," "estimates," "predicts," "potential," or "continue," or the negative of those words and other comparable words. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph's business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph's Form 10-K report for the year ended December 31, 2007 and other filings with the Securities and Exchange Commission ("SEC"), which are available at http://www.sec.gov, the SECs website, and at http://www.rudolphtech.com, the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Investors
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Trade Press
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com