Semiconductor International, June 2009
"Matt Pietrucha, marketing manager for the metrology business at Rudolph Technologies (Flanders, N.J.), is convinced that CD-SEM and OCD scatterometry will stick around. "Our customers use both -- the OCD for more of the inline, high-throughput, high-volume monitoring requirements, which provides a better CoO; but then there are capabilities that CD-SEM has that OCD lacks."
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