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In-Die vs. Scribe-Line Copper CMP Monitoring

Semiconductor International, October 2009

 

"To minimize resistance-capacitance (RC) delays, logic device manufacturers have transitioned from aluminum to copper interconnects and oxide to low-k materials. Copper has reduced RC delays, electromigration problems and manufacturing costs. Until recently, however, aluminum has remained the metal of choice for most memory applications because memory devices generally require fewer levels of interconnect and operate at slower speeds than logic devices."

 

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