Rudolph's advanced metrology technologies are applicable to a variety of film characterization applications extending far beyond measuring film thickness. Traditionally, many of these characterization applications required specialized offline technologies that were not suited to high-volume production monitoring. This is no longer the case with Rudolph's systems, as they generally measure both thickness and other film parameters simultaneously while offering the high speed, accuracy, repeatability, and tool-to-tool matching required for process control.

Rudolph's film characterization solutions include:

• Transparent Film Stoichiometry (t, n, and k)
• Composition
• Density
• Mechanical Strength (Young's Modulus)
• Phase Identification