Automated test floor inspection and metrology is used to monitor probing and inking processes. Probe mark and ink dot inspection allows defective devices to be eliminated from advancing through the manufacturing process. In addition, detecting an out of tolerance prober and adjusting the process will lead to increased yields and faster time to market.

Typical test floor defects include:

• Probe mark location
• Probe marks too big or too small
• Pad discoloration
• Probe mark damage
• Missing ink dots
• Misplaced ink dots
• Splattered ink