February 3, 2011

Avago Technologies Selects Automated Inspection and Metrology Solution from Rudolph for Advanced Optoelectronics Devices

NSX inspection systems play key role in Avago’s efforts to enhance process yields

Flanders, New Jersey (February 3, 2011)—Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, announces orders for its NSX® Series from Avago Technologies Manufacturing (Singapore) Pte. Ltd. Avago will use the NSX System for front-end inspection at its advanced optoelectronic devices wafer fabrication site in Singapore, which manufactures leading edge high speed VCSELs, detectors and light emitting diodes.

The NSX automated macro defect inspection system will provide both metrology and inspection data, and will play a central role in assisting the enhancement of Avago’s process yields. This system, scheduled for shipment in Q1, is the second purchased by Avago. The first NSX System shipped in Q4 2010. Additional orders to extend automated inspection into back-end applications are anticipated in the coming year.

“As our production volumes scale up, we have turned increasing attention to improving process yields,” said Tom White, Avago’s worldwide director of Optoelectronics Devices Operation. “The NSX System will allow us to improve the reliability and repeatability of our inspection procedures and our operation efficiency. In addition, we are using the Rudolph tools to measure critical dimension and overlay metrics at a significant cost savings over standalone metrology tools.”

KeeAnn Tan, Rudolph’s S.E. Asia general manager, added, “We are particularly excited to win this business in the rapidly expanding market for advanced optoelectronic devices. The   pricing of these devices typically provides extremely high leverage and fast payback for investments in yield improvement. We look forward to working with Avago to extend automated inspection and metrology across their entire manufacturing enterprise, including back-end packaging and assembly processes.”

Rudolph’s NSX Series is a fast, precise, production-proven solution for automated macro defect inspection throughout the device manufacturing process. Macro defects may be created during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic or optoelectronic device and the yield of the manufacturing process. The NSX system quickly and accurately detects yield-inhibiting defects, providing quality assurance as well as valuable process information needed to reduce manufacturing costs and time-to-market for new products. Rudolph’s Discover Enterprise™ software integrates data from inspection, metrology and manufacturing tools throughout the fab to provide enterprise-wide visibility of process performance.

About Avago Technologies
Avago Technologies is a leading supplier of analog interface components for communications, industrial and consumer applications. By leveraging its core competencies in III-V compound and silicon semiconductor design and processing, the company provides an extensive range of analog, mixed signal and optoelectronics components and subsystems to approximately 40,000 end customers. Backed by strong customer service support, the company's products serve four diverse end markets: wireless communications, wired infrastructure, industrial and automotive electronics, and consumer and computing peripherals. Avago has a global employee presence and heritage of technical innovation dating back nearly 50 years to its Hewlett-Packard roots. Information about Avago is available on the Web at

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company’s yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include demand for Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s expectations about our future orders, bookings and backlog as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2009 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Steven R. Roth

Trade Press:
Virginia Becker