Newsroom

May 29, 2012

Large Assembly and Test Facility Selects Rudolph NSX Series to Meet Advanced Packaging Demand

Wafer-level packaging drives inspection market growth – as demonstrated by this large order for 14 NSX Inspection Systems

Flanders, New Jersey (May 29, 2012)—Rudolph Technologies, Inc. (NASDAQ: RTEC), the leader in the high-growth market for back-end macro defect inspection, announced today that a large OSAT (outsourced semiconductor assembly and test) company has placed orders for 14 NSX® Series 320 Inspection Systems. The NSX Systems, scheduled for Q2 2012 installation, will be used for inspection in multiple steps during wafer-level chip-scale packaging (WLCSP) processes.

Nathan Little, vice president and general manager of Rudolph’s Inspection Business, stated, “As confirmed by our strong order book for this new tool, packaging and test houses want to take advantage of the latest-generation inspection equipment to maximize throughput and productivity. The NSX 320 System performs defect inspection, 2D bump metrology and acquires on-the-fly defect images for maximum productivity and flexibility. In addition, WLCSP requires flexibility for handling substrates in a variety of formats while collecting detailed defect and 2D metrology information during the inspection process; the NSX 320 System incorporates whole wafer and film frame handling solutions to address this requirement.”

The NSX 320 System was selected after a competitive evaluation for its high speed and efficient, easy-to-use operating procedures, which delivered the highest productivity and lowest cost-of-ownership of all the tools considered.

This order is evidence of the leading position the NSX 320 Inspection System has established in the rapidly growing market for back-end inspection,” Little added. “Rudolph’s R&D investments in technology-leading products and the history we have with our back-end customers, gives us the ability to respond to the changing requirements in this important market segment.”

The NSX 320 System provides defect inspection for next-generation packaging processes at full-production throughput. Automatic recipe sharing between modules, smart wafer scheduling and in-use recipe editing make it an extremely efficient and productive inspection tool.

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company’s yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at http://www.rudolphtech.com

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Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2011 and other filings with the Securities and Exchange Commission.  As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Investors:
Steven R. Roth
973.448.4302
steven.roth@rudolphtech.com

Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com