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April 13, 2012

Rudolph Technologies Schedules 2012 First Quarter Earnings Conference Call and Webcast

FLANDERS, N.J., April 13, 2012 -- Rudolph Technologies, Inc. (Nasdaq:RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, will release results for the 2012 first quarter, after the market closes on Monday, April 30, 2012. In conjunction with this release, Rudolph will host a conference call, which will be broadcast live over the Internet. Paul F. McLaughlin, Chairman and Chief Executive Officer, and Steven Roth, Chief Financial Officer will host the call.

April 30, 2012

4:30pm EDT

To access the live conference call, please dial (888) 603-6873 and reference Conference ID # 71094029. A live webcast will also be available on the Company's website at www.rudolphtech.com.

There will be a replay of the conference call available for one week following the live broadcast. To access the replay, please dial 855-859-2056 and reference Conference ID # 71094029.

About Rudolph Technologies
Rudolph is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. Rudolph has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary inspection and metrology solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site.