NSX Metrology Series
Combining macro defect inspection and 3D metrology for advanced packaging applications
S3000SX
Advanced transparent film metrology for the 28nm process node and below
JetStep System
2x reduction stepper for advanced packaging applications
PanelPrinter 6700
Step-and-repeat lithography panel printer for up to Gen 3.5
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PanelPrinter 9200
Step-and-repeat lithography panel printer for up to Gen 4.5
Reflex TT MBI
Table top mask blank inspection for R&D
ProcessWORKS
Run-to-run control
ARTIST
Fault detection and classification - collect and analyze data to prohibit scrap-generating events
AutoShell
Equipment Automation Software - Coordinate data flow between operators, equipment and factory systems
TrueADC Enterprise
High performance ADC
Process Sentinel
Sort and defect spatial pattern recognition software
ProcessWORKS
Run-to-run control
Discover Enterprise
Seamless integration of yield and defect management software
ARTIST
Fault detection and classification - collect and analyze data to prohibit scrap-generating events
AutoShell
Equipment Automation Software - Coordinate data flow between operators, equipment and factory systems
Probe Card Interface
Customer and application-specific mechanical and electrical interfaces that are critical for the probe card test and analysis process
ProbeWoRx 300
High speed, high force, and high throughput for high pin-count, large array probe cards
AXi 940
Productive defect detectability in multiple applications
Harmony ASR
A fast, intuitive, off-line, all-surface review and classification solution
TrueADC Enterprise
High performance ADC
TrueADC Enterprise
High performance ADC for LED Manufacturers
AWX
Unpatterned wafer frontside inspection
Reflex TT
Table top wafer inspection for R&D
Reflex TT MBI
Table top mask blank inspection for R&D
Reflex TT
Table top wafer inspection for R&D
