Products

SONUS System

Acoustic metrology and defect inspection for advanced semiconductor process control

SONUS System

Acoustic metrology and defect inspection for advanced semiconductor process control

NSX 220

Automated defect inspection for MEMS, LED and Semiconductors

Automated defect inspection for MEMS, LED and Semiconductors

NSX 220

Automated defect inspection for MEMS, LED and Semiconductors

JetStep S Series

Stepper designed for advanced packaging lithography on square or rectangular substrates up to Gen 3.5 size

NSX Metrology Series

Combining macro defect inspection and 3D metrology for advanced packaging applications