May 2, 2012
Frontside Advanced Macro Defect Inspection
Advanced macro defect inspection offers value, performance and flexibility to deploy 100% inspection throughout the fab, including key process steps such as litho, etch, CMP and quality control. Typical defects include:
- Pattern defects
- Incomplete Etch
- Resist Defects
- Large Scale Contamination
The F30™ Inspection Module is the latest in the Rudolph series of advanced macro inspection modules. Designed to blur the lines between DF micro inspection and traditional macro inspection, the F30 module boasts a five-objective turret that enables the resolution-throughput flexibility required in multi-process inspection applications.