For research and development

Cost-effective unpatterned wafer and mask blank inspection for research institutes, universities and consortia

Research, testing and prototyping are an important step in bringing new technologies to the semiconductor manufacturing floor.  Rudolph provides an ideal solution to evaluate our unpatterned wafer inspection technologies by conducting process characterization studies and contamination monitoring prior to committing to HVM equipment purchases.

Learn more about the Reflex TT™ – a table-top, manually loaded wafer inspection tool for detecting particles, scratches, area defects and micro-roughness on unpatterned wafers and mask blanks.

Reflex TT

Table top wafer inspection for R&D

Reflex TT MBI

Table top mask blank inspection for R&D