New software solution integrates wafer and sensor level data streams to enable advanced fault detection to optimize equipment and fab performance
FLANDERS, NEW JERSEY (July 14, 2015)—Rudolph Technologies, Inc. (NYSE: RTEC) today introduced Equipment Sentinel™, a state-of-the-art, automated fault detection and classification (FDC) software solution that seamlessly combines key wafer-level data with high-fidelity tool signal and event data into a single framework, giving users a comprehensive, easy-to-understand view of their processes and equipment. Currently installed at multiple beta sites worldwide, fab personnel will use Equipment Sentinel software to extract the maximum value from the voluminous amounts of data generated in today’s semiconductor operations.
“Many applications have been developed over the years to address advanced tool monitoring and control for semiconductor manufacturing, but they are typically focused on either wafer or equipment state information, not both,” said Thomas Sonderman, vice president and general manager of Rudolph’s Software Business Unit. “Equipment Sentinel integrates these formerly independent data streams into a powerful monitoring and control engine to enable timely actionable intelligence, greatly enhancing optimization capabilities with predictive analytics in the fab.”
Rudolph’s new Equipment Sentinel software is truly a next-generation FDC platform with built-in intelligence that can efficiently identify and isolate the cause of abnormal operating conditions and implement corrective actions to reduce product jeopardy and increase overall equipment effectiveness.
Equipment Sentinel is the only process control software with a framework that provides global manufacturers of semiconductors, compound semiconductors, LEDs, and flat panel displays with a detailed snapshot of the performance for the process and of all the equipment in their fab. Its bi-directional data flows enable both sensor and product data to be tightly correlated into a single knowledge computing engine, maximizing signal-to-noise ratios, and thus, avoiding the false positives that typically plague many traditional FDC solutions. This is one of the many differentiating capabilities that allow users to quickly detect and resolve actual issues that impact operational performance and product yield. The implementation of Equipment Sentinel software can dramatically improve engineering effectiveness thereby significantly lowering the cost required to resolve complex tool performance issues resulting in improved fab operational efficiency.
“The ability to quickly detect, isolate and correct actual tool excursions provides unparalleled value to a manufacturing operation. In many cases, the detection of a single critical incident more than offsets the total cost of this type of system,” added Sonderman. “Equipment Sentinel is capable of acquiring, processing and analyzing the massive amounts of data generated in today’s high-tech manufacturing environments, providing a new avenue for corrective actions to ensure the maximum return on investment for semiconductor manufacturers.”
For more information, please visit www.Onto Innovationtech.com, or stop by the Rudolph booth #5580 during SEMICON® West, taking place July 14-16, 2015.
About Rudolph Technologies
Rudolph Technologies, Inc. is a leader in the design, development, manufacture and support of defect inspection, lithography, process control metrology, and data analysis systems and software used by semiconductor and advanced packaging device manufacturers worldwide. Rudolph delivers comprehensive solutions throughout the fab with its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market of their devices. The Company’s expanding portfolio of equipment and software provides comprehensive solutions for front-end wafer processing, final manufacturing and advanced packaging of ICs. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.Onto Innovationtech.com.
Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include the benefits to customers of Rudolph’s products, Rudolph’s business momentum and future growth, Rudolph’s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph’s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company’s ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph’s Form 10-K report for the year ended December 31, 2014 and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Rudolph’s current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.
Contacts
Investors:
Steven R. Roth
973.448.4302
steven.roth@Onto Innovationtech.com
Guerrant Associates:
Laura Guerrant-Oiye
Principal
808.882.1467
[email protected]
Trade Press:
Amy Shay
952.259.1794
amy.shay@Onto Innovationtech.com