Measuring film stacks, whether opaque or transparent, requires accuracy and repeatability. Rudolph's techniques are well-established and trusted by semiconductor manufacturers around the globe.
Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers
Transparent film metrology for front-end semiconductor manufacturing
Transparent film metrology for specialty foundry, RF, MEMS market requiring small wafer handling from 100 to 200mm