Parts & Logistics

Critical spares when you need them

Our facilities are strategically located in each semiconductor manufacturing region of the world, and our personnel stand ready to respond with a full range of on-site process support solutions.


Our multi-million dollar spare parts inventory is designed to support most major and minor component requests. Replacement parts can be expedited from any of our parts depot locations to arrive at your site promptly, usually in less than 24 hours.

Customer Response Centers

USA: 877.467.8365

China: (+86) 21.6093.0600

Europe: (+44) 131.273.4321

Japan: (+81) 44. 829.6511

Korea: (+82) 31.713.9705

Singapore: (+65) 6.749.6988

Taiwan: (+886) 3.516.9230