Products

For semiconductor manufacturers

Fabs want the total solution: Defect detection, analysis, classification and review

Rudolph’s Total Solution package includes one or more Rudolph inspection modules paired with Discover Software® for inline defect analysis and data management and TrueADC Software™ for inline automatic defect classification. Using this approach, wafer fabs and advanced packaging facilities can improve yield by performing high-speed, automated inspection using the Rudolph F30 or NSX® inspection module for frontside defect detection, and can quickly identify edge and/or backside defects using the E/B inspection module(s). Rudolph inspection systems can detect defects down to one micron on patterned wafers. Discover Software is designed to seamlessly handle advanced macro frontside, edge and backside inspection results. When the E30 and B30 modules are paired with a wafer frontside inspection module, correlation of defect data from all surfaces provides faster, more efficient response to defectivity issues.  Offline review, designed to increase inspection and classification throughput, guides users through the sequences of defect classification and correlation.

Explorer Cluster

Intelligent, adaptive wafer scheduling, flexible inspection configurations and multiple loadport options

F30

Enables resolution-throughput flexibility for multi-process inspection applications

NSX 320

Advanced macro defect inspection designed specifically for advanced packaging processes that use TSV

NSX Metrology Series

Combining macro defect inspection and 3D metrology for advanced packaging applications

NSX 220

Automated defect inspection for MEMS, LED and Semiconductors

E/B Module

High-throughput full edge and backside inspection

Wafer Scanner

3D/2D wafer inspection system for post-fab processes

SONUS System

Acoustic metrology and defect inspection for advanced semiconductor process control

Discover

In-line, all-surface defect analysis and data management

TrueADC Enterprise

High performance ADC

Harmony ASR

A fast, intuitive, off-line, all-surface review and classification solution

AWX

All-Surface, Unpatterned Wafer Inspection

Reflex TT

Table top wafer inspection for R&D

AMX 6000

Automated Mask Blank Inspection

Reflex TT MBI

Table top mask blank inspection for R&D