Explorer Cluster
Intelligent, adaptive wafer scheduling, flexible inspection configurations and multiple loadport options
Fabs want the total solution: Defect detection, analysis, classification and review
Rudolph’s Total Solution package includes one or more Rudolph inspection modules paired with Discover Software® for inline defect analysis and data management and TrueADC Software™ for inline automatic defect classification. Using this approach, wafer fabs and advanced packaging facilities can improve yield by performing high-speed, automated inspection using the Rudolph F30™ or NSX® inspection module for frontside defect detection, and can quickly identify edge and/or backside defects using the E/B inspection module(s). Rudolph inspection systems can detect defects down to one micron on patterned wafers. Discover Software is designed to seamlessly handle advanced macro frontside, edge and backside inspection results. When the E30 and B30 modules are paired with a wafer frontside inspection module, correlation of defect data from all surfaces provides faster, more efficient response to defectivity issues. Offline review, designed to increase inspection and classification throughput, guides users through the sequences of defect classification and correlation.
F30
Enables resolution-throughput flexibility for multi-process inspection applications
NSX 320
Advanced macro defect inspection designed specifically for advanced packaging processes that use TSV
NSX Metrology Series
Combining macro defect inspection and 3D metrology for advanced packaging applications
E/B Module
High-throughput full edge and backside inspection
NSX 100, 105, 115
Probe mark inspection: quality assurance for Known Good Die and die products
Wafer Scanner
3D/2D wafer inspection system for post-fab processes
Discover
In-line, all-surface defect analysis and data management
TrueADC Enterprise
High performance ADC
Harmony ASR
A fast, intuitive, off-line, all-surface review and classification solution
AWX
All-Surface, Unpatterned Wafer Inspection
Reflex TT
Table top wafer inspection for R&D
AMX 6000
Automated Mask Blank Inspection
Reflex TT MBI
Table top mask blank inspection for R&D
