ControlWORKS
Providing an open, object-oriented development environment
For nearly 20 years, Rudolph’s full-featured, commercially supported equipment control has provided timely delivery of products to market and helped to minimize development and maintenance costs
Leading equipment manufacturers trust Rudolph equipment control to address the complex requirements of semiconductor production tools. Our comprehensive, object-oriented machine control framework enables users to create more flexible, reusable, and maintainable software that seamlessly integrates with Rudolph’s advanced process control and yield management software.
