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Technical Support

Metrology

1-973-448-4401
metrology.support@rudolphtech.com 

Inspection

1-952-259-1666
inspection.support@rudolphtech.com

Lithography

1-978-253-6222
lithography.support@rudolphtech.com 

Fabwide Software

1-978-319-4722
ISG@rudolphtech.com

Headquarters

16 Jonspin Road
Wilmington, Massachusetts 01887

Tel: 978.253.6200
Fax: 978.658.6349

info@rudolphtech.com